New PDF release: Optical Measurement of Surface Topography

By Richard Leach (auth.), Richard Leach (eds.)

ISBN-10: 3642120113

ISBN-13: 9783642120114

The dimension and characterisation of floor topography is essential to fashionable production undefined. The regulate of areal floor constitution permits a producer to considerably regulate the performance of a component. Examples contain structuring to impact fluidics, optics, tribology, aerodynamics and biology. to regulate such manu­facturing equipment calls for dimension options. there's now a wide variety of recent optical suggestions out there, or being constructed in academia, which could degree areal floor topography. each one approach has its robust issues and obstacles. The booklet begins with introductory chapters on optical tools, their universal language, prevalent positive factors and boundaries, and their calibration. every one kind of glossy optical software is defined (in a typical structure) through a professional within the box. The publication is meant for either business and educational scientists and engineers, and should be worthy for undergraduate and postgraduate studies.

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Fundamental principles of engineering nanometrology. : Fundamentals of light microscopy and electronic imaging. : Advanced light microscopy. In: Principles and basic optics, vol. 1. : Errors in phase measurement interferometry with high numerical aperture. Appl. Opt. : Aberrations of optical systems. CRC Press, Boca Raton (1986) 3 Limitations of Optical 3D Sensors Gerd Häusler and Svenja Ettl Institute for Optics, Information and Photonics, University Erlangen-Nuremberg Staudtstr. 7/B2 91058 Erlangen, Germany Abstract.

6 Optical Spot Size Another important factor for optical instruments that magnify the surface being measured is the optical spot size. For scanning type instruments the spot size will determine the area of the surface measured as the instrument scans. e. it acts as a low pass filter (Krüger-Sehm et al. 2006). 5) where f is the focal length of the objective lens and w0 is the beam waist (the radius of the 1/e2 irradiance contour at the plane where the wavefront is flat). 7 Field of View The field of view is the diameter of the circle of illumination on the object.

Less than a quarter of a wavelength (see Sect. 4). 6 Optical Spot Size Another important factor for optical instruments that magnify the surface being measured is the optical spot size. For scanning type instruments the spot size will determine the area of the surface measured as the instrument scans. e. it acts as a low pass filter (Krüger-Sehm et al. 2006). 5) where f is the focal length of the objective lens and w0 is the beam waist (the radius of the 1/e2 irradiance contour at the plane where the wavefront is flat).

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Optical Measurement of Surface Topography by Richard Leach (auth.), Richard Leach (eds.)


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